Deep-UV resists with improved delay capabilities.

FUNHOFF D J H; BINDER H; SCHWALM R

Art

J-GLOBAL ID：200902070217622492 Reference number：92A0633956

Deep-UV resists with improved delay capabilities.

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Author (3)： , ,
Material：
Volume： 1672 Page： 46-55 Publication year： 1992
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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