Art
J-GLOBAL ID：200902074300451530   Reference number：91A0273795

Handling of particles in forevacuum pumps.

粗引きポンプ内の粒子の取扱い
Author (2)：
BERGES H-P

About BERGES H-P

(Leybold AG, Cologne, DEU)

About Leybold AG, Cologne, DEU

, 
KUHN M

About KUHN M

(Leybold AG, Cologne, DEU)

About Leybold AG, Cologne, DEU


Material：
Vacuum

About Vacuum


Volume： 41  Issue： 7/9  Page： 1828-1832  Publication year： 1990 
JST Material Number： E0347A  ISSN： 0042-207X  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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chemical vapor deposition

About chemical vapor deposition

,...
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Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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乾式真空ポンプ

About 乾式真空ポンプ


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition 
(BK14020I)

About Techniques and equipment of thin film deposition

,  Vacuum production and techniques 
(BA02020L)

About Vacuum production and techniques

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取扱い

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