CF and CF<sub>2</sub> actinometry in a CF<sub>4</sub>/Ar plasma.

KISS L D B; NICOLAI J-P; CONNER W T; SAWIN H H

Art

J-GLOBAL ID：200902074917082486 Reference number：92A0363365

CF and CF₂ actinometry in a CF₄/Ar plasma.

CF₄/ArプラズマのCFとCF₂の光量測定

Publisher site Copy service {{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=92A0363365&COPY=1") }}
Access JDreamⅢ for advanced search and analysis. {{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=92A0363365&from=J-GLOBAL&jstjournalNo=C0266A") }}

Author (4)： , , ,
Material：
Volume： 71 Issue： 7 Page： 3186-3192 Publication year： Apr. 01, 1992
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

,...

To see more with JDream III (charged). {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=92A0363365&from=J-GLOBAL&jstjournalNo=C0266A") }}

Plasma diagnostics

, , ,

Return to Previous Page

CF and CF2 actinometry in a CF4/Ar plasma.

CF and CF₂ actinometry in a CF₄/Ar plasma.