Art
J-GLOBAL ID：200902076483211102
Reference number：88A0360777
CO2 laser cleaning of black deposits formed during the excimer laser etching of polyimide in air.
空気中でポリイミドのエキシマレーザによるエッチングで生成された黒色沈着物のCO2レーザによる浄化
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Author (2)：
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Material：
Volume：
45
Issue：
1
Page：
45-46
Publication year：
Jan. 1988
JST Material Number：
E0501B
ISSN：
0946-2171
CODEN：
APBOEM
Document type：
Article
Article type：
短報
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages
Terms in the title (8)：
Terms in the title
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