Art
J-GLOBAL ID：200902085016653680
Reference number：90A0605555
A fast, preparation-free method to detect iron in silicon.
Si中のFeを検出する迅速で検査用試料作製の必要がない方法
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Author (2)：
,
Material：
Volume：
67
Issue：
11
Page：
6764-6771
Publication year：
Jun. 01, 1990
JST Material Number：
C0266A
ISSN：
0021-8979
CODEN：
JAPIAU
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Lattice defects in semiconductors
, Other phsical analysis
Terms in the title (4)：
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,
,
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