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J-GLOBAL ID:200902089234585927   Reference number:89A0496957

Plasma source ion implantation: A new approach to ion beam modification of materials.

プラズマ源イオン打込み 材料のイオンビーム改質における新しい方法
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Volume: 116  Page: 197-203  Publication year: Aug. 15, 1989 
JST Material Number: D0589B  ISSN: 0921-5093  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Irradiational changes in properties and structures in general 
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