Art
J-GLOBAL ID：200902091205851876   Reference number：88A0208294

Structure of TiN coatings deposited at relatively high rates and low temperatures by magnetron sputtering.

マグネトロンスパッタリングにより比較的高速,低温で形成したTiNコーティング膜の構造
Author (4)：
VALVODA V

About VALVODA V

(Charles Univ., Prague, CSK)

About Charles Univ., Prague, CSK

, 
KUZEL R JR

About KUZEL R JR

(Charles Univ., Prague, CSK)

About Charles Univ., Prague, CSK

, 
CERNY R

About CERNY R

(Charles Univ., Prague, CSK)

About Charles Univ., Prague, CSK

, 
MUSIL J

About MUSIL J

(Inst. Physics, Czechoslovak Academy of Sciences, Prague, CSK)

About Inst. Physics, Czechoslovak Academy of Sciences, Prague, CSK


Material：
Thin Solid Films

About Thin Solid Films


Volume： 156  Issue： 1  Page： 53-63  Publication year： Jan. 15, 1988 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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nitride

About nitride

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Ceramic coating to metallic materials 
(YC02050V)

About Ceramic coating to metallic materials

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
マグネトロンスパッタリング

About マグネトロンスパッタリング

, 
低温

About 低温

, 
TiN

About TiN

, 
コーティング膜

About コーティング膜


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