Art
J-GLOBAL ID：200902094526241483   Reference number：89A0005923

Fracture testing of silicon microelements in situ in a scanning electron microscope.

シリコン微小素子の走査電子顕微鏡下でのその場破壊試験
Author (4)：
JOHANSSON S

About JOHANSSON S

(Uppsala Univ., Uppsala, SWE)

About Uppsala Univ., Uppsala, SWE

, 
SCHWEITZ J-A

About SCHWEITZ J-A

(Uppsala Univ., Uppsala, SWE)

About Uppsala Univ., Uppsala, SWE

, 
TENERZ L

About TENERZ L

(Uppsala Univ., Uppsala, SWE)

About Uppsala Univ., Uppsala, SWE

, 
TIREN J

About TIREN J

(Uppsala Univ., Uppsala, SWE)

About Uppsala Univ., Uppsala, SWE


Material：
Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)

About Journal of Applied Physics


Volume： 63  Issue： 10  Page： 4799-4803  Publication year： May. 15, 1988 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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wafer

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,...
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JST classification (1)：
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Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
シリコン

About シリコン

, 
微小素子

About 微小素子

, 
走査電子顕微鏡

About 走査電子顕微鏡

, 
破壊試験

About 破壊試験


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