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J-GLOBAL ID:200902095436634911   Reference number:91A0038964

Ultra-precision positioning using lead screw drive. (1st Report). Fundamental study using a sliding screw or ball screw.

ねじ駆動による超精密位置決め (第1報) すべりねじとボールねじによる基礎的研究
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Volume: 56  Issue: 11  Page: 2033-2038  Publication year: Nov. 1990 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Machine tool elements,jigs,chucks 
Reference (7):
  • 1) D. S. Alles etal. : The Step and Repeat Camera, Bell Tech. J., Nov. (1970).
  • 2) 内田憲男ほか : 自動補償機構を備えた縦形の超精密XYステージ, 精密工学会誌, 54, 5 (1988) 884.
  • 3) 森山茂夫ほか : 圧電素子アクチュエータ微動機構を備えた超精密XY移動台, 精密機械, 50, 4 (1984) 718.
  • 4) 日本潤滑学会編 : 潤滑ハンドブック, 養賢堂, (1970) 681.
  • 5) 小渕信夫, 大塚二郎 : ボールねじの摩擦トルクに関する研究-ダブルナット方式の特性, 精密工学会誌, 52, 3 (1986) 528.
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