Crystallization of sputtered lead zirconate titanate films by rapid thermal processing.

VASANT KUMAR C V R; PASCUAL R; SAYER M

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J-GLOBAL ID：200902097622963413 Reference number：92A0179502

Crystallization of sputtered lead zirconate titanate films by rapid thermal processing.

ジルコン酸チタン酸鉛のスパッタ膜の短時間熱処理プロセスによる結晶化

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Material：
Volume： 71 Issue： 2 Page： 864-874 Publication year： Jan. 15, 1992
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films , Ferroelectrics,antiferroelectrics and ferroelasticity

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