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J-GLOBAL ID：200902099686274304   Reference number：91A0923542

Capacitively coupled glow discharges at frequencies above 13.56MHz.

13.56MHz以上の周波数における静電容量結合グロー放電
Author (2)：
SURENDRA M

About SURENDRA M

(Univ. California, California)

About Univ. California, California

, 
GRAVES D B

About GRAVES D B

(Univ. California, California)

About Univ. California, California


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 59  Issue： 17  Page： 2091-2093  Publication year： Oct. 21, 1991 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
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glow discharge

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JST classification (1)：
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Gas discharges 
(BJ03020T)

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Terms in the title (2)：
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静電容量

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, 
グロー放電

About グロー放電


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