Art
J-GLOBAL ID：200902101622963836   Reference number：96A0299577

The fracture strength of nitrogen doped silicon wafers.

窒素ドープシリコンウエハの破壊強度
Author (2)：
VEDDE J

About VEDDE J

(Topsil Semiconductor Materials, Frederikssund, DNK)

About Topsil Semiconductor Materials, Frederikssund, DNK

, 
GRAVESEN P

About GRAVESEN P

(Danfoss, Nordborg, DNK)

About Danfoss, Nordborg, DNK


Material：
Materials Science & Engineering. B. Solid-State Materials for Advanced Technology  (Mater Sci Eng B)

About Materials Science & Engineering. B. Solid-State Materials for Advanced Technology


Volume： 36  Issue： 1/3  Page： 246-250  Publication year： Jan. 1996 
JST Material Number： T0553A  ISSN： 0921-5107  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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silicon

About silicon

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Materials of solid-state devices 
(NC03020K)

About Materials of solid-state devices

,  Mechanical properties of solids in general 
(BL01021C)

About Mechanical properties of solids in general

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
窒素ドープ

About 窒素ドープ

, 
シリコンウエハ

About シリコンウエハ

, 
破壊強度

About 破壊強度


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