Art
J-GLOBAL ID：200902102167578747   Reference number：01A0165323

Ammonia Cluster Beam for Group-III Nitride Synthesis.

III族窒化物合成用のアンモニアクラスタビーム
Author (6)：
SAITO H

About SAITO H

(Okayama Univ. Sci., Okayama, JPN)

About Okayama Univ. Sci., Okayama, JPN

, 
KATO T

About KATO T

(Okayama Univ. Sci., Okayama, JPN)

About Okayama Univ. Sci., Okayama, JPN

, 
YONETA M

About YONETA M

(Okayama Univ. Sci., Okayama, JPN)

About Okayama Univ. Sci., Okayama, JPN

, 
OHISHI M

About OHISHI M

(Okayama Univ. Sci., Okayama, JPN)

About Okayama Univ. Sci., Okayama, JPN

, 
MATSUO J

About MATSUO J

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
YAMADA I

About YAMADA I

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN


Material：
Physica Status Solidi. A. Applied Research  (Phys Status Solidi A)

About Physica Status Solidi. A. Applied Research


Volume： 180  Issue： 1  Page： 251-256  Publication year： Jul. 16, 2000 
JST Material Number： D0774A  ISSN： 0031-8965  Document type： Article
Article type： 原著論文  Country of issue： Germany, Federal Republic of (DEU)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*Ammonia

About Ammonia

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

,  Electron and ion sources 
(BD02020U)

About Electron and ion sources

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
III族

About III族

, 
窒化物

About 窒化物

, 
アンモニア

About アンモニア

, 
クラスタビーム

About クラスタビーム


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