Improvement of electrical properties of epitaxial SrTiO<sub>3</sub> films on Si(001)-2×1 by in situ annealing.

TAMBO T; MAEDA K; SHIMIZU A; TATSUYAMA C

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J-GLOBAL ID：200902102263621050 Reference number：99A0892673

Improvement of electrical properties of epitaxial SrTiO₃ films on Si(001)-2×1 by in situ annealing.

その場アニールによるSi(001)-2×1上のエピタキシャルSrTiO₃膜の電気的性質の改善

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Author (4)： , , ,
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Volume： 86 Issue： 6 Page： 3213-3217 Publication year： Sep. 15, 1999
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films

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Improvement of electrical properties of epitaxial SrTiO3 films on Si(001)-2×1 by in situ annealing.

Improvement of electrical properties of epitaxial SrTiO₃ films on Si(001)-2×1 by in situ annealing.