Art
J-GLOBAL ID：200902102685621478   Reference number：93A0242250

Electromagnetic fields in a radio-frequency induction plasma.

高周波誘導プラズマ中の電磁場
Author (4)：
HOPWOOD J

About HOPWOOD J

(IBM Research Division, New York)

About IBM Research Division, New York

, 
GUARNIERI C R

About GUARNIERI C R

(IBM Research Division, New York)

About IBM Research Division, New York

, 
WHITEHAIR S J

About WHITEHAIR S J

(IBM Research Division, New York)

About IBM Research Division, New York

, 
CUOMO J J

About CUOMO J J

(IBM Research Division, New York)

About IBM Research Division, New York


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 11  Issue： 1  Page： 147-151  Publication year： Jan. 1993 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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plasma diagnostics

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
plasma treatment

About plasma treatment

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Applications of plasma 
(BJ02110K)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
高周波

About 高周波

, 
誘導プラズマ

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, 
電磁場

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