Art
J-GLOBAL ID：200902104944793978   Reference number：99A0297070

Surface passivation of silicon by rf magnetron-sputtered silicon nitride films.

rfマグネトロンスパッタ蒸着窒化けい素膜によるシリコンの表面不動態化
Author (1)：
VETTER M

About VETTER M

(Univ. Stuttgart, Stuttgart, DEU)

About Univ. Stuttgart, Stuttgart, DEU


Material：
Thin Solid Films

About Thin Solid Films


Volume： 337  Issue： 1/2  Page： 118-122  Publication year： Jan. 11, 1999 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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*passivation

About passivation

,...
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Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
FTIR spectra

About FTIR spectra

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Semiconductor-semiconductor contacts without Gr.13-15 element compounds 
(BM03083P)

About Semiconductor-semiconductor contacts without Gr.13-15 element compounds

,  Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

,  Solar cell 
(NC03084O)

About Solar cell

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
RF

About RF

, 
マグネトロン

About マグネトロン

, 
スパッタ蒸着

About スパッタ蒸着

, 
窒化

About 窒化

, 
けい素膜

About けい素膜

, 
シリコン

About シリコン

, 
表面不動態化

About 表面不動態化


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