Art
J-GLOBAL ID：200902105128967522   Reference number：98A0652819

Preparation of Ti-Al gradient composite films by sputtering.

スパッタによるTi-Al傾斜組成膜の作製
Author (2)：
TAKEDA F

About TAKEDA F

(Toyama National Coll. Technol., Toyama, JPN)

About Toyama National Coll. Technol., Toyama, JPN

, 
NAKAJIMA T

About NAKAJIMA T

(Toyama National Coll. Technol., Toyama, JPN)

About Toyama National Coll. Technol., Toyama, JPN


Material：
Thin Solid Films

About Thin Solid Films


Volume： 316  Issue： 1/2  Page： 68-72  Publication year： Mar. 21, 1998 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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*sputtered deposition

About sputtered deposition

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Metallic thin films 
(BK14030T)

About Metallic thin films

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
スパッタ

About スパッタ

, 
Ti-Al

About Ti-Al

, 
傾斜組成

About 傾斜組成

, 
作製

About 作製


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