Art
J-GLOBAL ID：200902105614972902   Reference number：02A0058883

Sacrificial Anodic Oxidation of 6H-SiC.

6H-SiCの犠牲陽極酸化
Author (3)：
KATO M

About KATO M

(Nagoya Inst. Technol., Nagoya, JPN)

About Nagoya Inst. Technol., Nagoya, JPN

, 
ICHIMURA M

About ICHIMURA M

(Nagoya Inst. Technol., Nagoya, JPN)

About Nagoya Inst. Technol., Nagoya, JPN

, 
ARAI E

About ARAI E

(Nagoya Inst. Technol., Nagoya, JPN)

About Nagoya Inst. Technol., Nagoya, JPN


Material：
Japanese Journal of Applied Physics. Part 2. Letters  (Japanese Journal of Applied Physics. Part 2. Letters & Express Letters)

About Japanese Journal of Applied Physics. Part 2. Letters


Volume： 40  Issue： 11A  Page： L1145-L1147  Publication year： Nov. 01, 2001 
JST Material Number： F0599B  ISSN： 0021-4922  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*silicon carbide

About silicon carbide

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*anodic oxidation

About anodic oxidation


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
6H-SiC

About 6H-SiC

, 
犠牲陽極

About 犠牲陽極

, 
酸化

About 酸化


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