Art
J-GLOBAL ID：200902106582521608   Reference number：96A0470286

Scanning force microscopy with two optical levers for detection of deformations of the cantilever.

片持ち梁の変形を検出するための二個の光てこを持った走査型力顕微鏡
Author (2)：
KAWAKATSU H

About KAWAKATSU H

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
SAITO T

About SAITO T

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 14  Issue： 2  Page： 872-876  Publication year： Mar. 1996 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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cantilever beam

About cantilever beam

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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optical lever

About optical lever

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Electron and ion microscopes 
(BD02050B)

About Electron and ion microscopes

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
片持ち梁

About 片持ち梁

, 
光てこ

About 光てこ

, 
走査型力顕微鏡

About 走査型力顕微鏡


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