Art
J-GLOBAL ID：200902107392524410
Reference number：96A0286509
Synchrotron Radiation Micromachining of Polymers to Produce High-Aspect-Ratio Microparts.
高アスペクト比のマクロパーヅを作製するための高分子のシンクロトロン放射マイクロマシニング
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Author (2)：
,
Material：
Volume：
35
Issue：
2A
Page：
L186-L188
Publication year：
Feb. 01, 1996
JST Material Number：
F0599B
ISSN：
0021-4922
Document type：
Article
Article type：
短報
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
, Techniques for samples
, Special machining
Reference (15)：
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EHRFELD, W. J. Vac. Sci.& Technol. 1988, B6, 178
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WHITE, V. Appl. Phys. Lett. 1995, 66, 2072
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ZHANG, Y. Appl. Phys. Lett. 1995, 67, 872
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SRINIVASAN, R. Chem. Rev. 1989, 89, 1303
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WADA, S. Appl. Phys. Lett. 1993, 63, 211
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