Fracture resistance enhancement of diamond-like carbon/nitrogenated diamond-like carbon multilayer deposited by electron cyclotron resonance microwave plasma chemical vapor deposition.

QI J; LAI K H; BELLO I; LEE C S; LEE S T; LUO J B; WEN S Z

Art

J-GLOBAL ID：200902109431650723 Reference number：01A0238103

Fracture resistance enhancement of diamond-like carbon/nitrogenated diamond-like carbon multilayer deposited by electron cyclotron resonance microwave plasma chemical vapor deposition.

電子サイクロトロン共鳴マイクロ波プラズマCVDにより堆積したダイヤモンド状炭素/窒素化ダイヤモンド状炭素多層膜の破壊強さの改善

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Material：
Volume： 19 Issue： 1 Page： 130-135 Publication year： Jan. 2001
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Thin films of other inorganic compounds , Mechanical properties of solids in general

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