Investigation of thermal properties of ruthenium(III) β-diketonate precursors for preparation of RuO<sub>2</sub> films by CVD.

BYKOV A F; MOROZOVA N B; IGUMENOV I K; SYSOEV S V

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J-GLOBAL ID：200902111988876710 Reference number：96A0827423

Investigation of thermal properties of ruthenium(III) β-diketonate precursors for preparation of RuO₂ films by CVD.

CVDによるRuO₂膜の調製のためのルテニウム(III)β-ジケトナート前駆体の熱特性の研究

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Volume： 46 Issue： 6 Page： 1551-1565 Publication year： Jun. 1996
JST Material Number： H0095C ISSN： 0368-4466 CODEN： JTHEA Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Platinum family element complexes , Oxide thin films

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Investigation of thermal properties of ruthenium(III) β-diketonate precursors for preparation of RuO2 films by CVD.

Investigation of thermal properties of ruthenium(III) β-diketonate precursors for preparation of RuO₂ films by CVD.