Analysis of platelet distribution in H ion-implanted silicon.

IWATA H; TAKAGI M; TOKUDA Y; IMURA T

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J-GLOBAL ID：200902112285536159 Reference number：00A0437402

Analysis of platelet distribution in H ion-implanted silicon.

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Author (4)： , , ,
Material：
Volume： 210 Issue： 1/3 Page： 94-97 Publication year： Mar. 2000
JST Material Number： B0942A ISSN： 0022-0248 Document type： Article
Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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