Rchr
J-GLOBAL ID：200901061534597727
Update date: May. 29, 2020
Tokuda Yutaka
トクダ ユタカ | Tokuda Yutaka
Affiliation and department：
Aichi Institute of Technology Faculty of Engineering, Department of Electronics
About Aichi Institute of Technology Faculty of Engineering, Department of Electronics
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Detailed information
Research field (1)：
Electronic devices and equipment
Research keywords (2)：
半導体デバイス
, Semiconductor Device
Research theme for competitive and other funds (2)：
半導体デバイスプロセスに関する研究
Study on Semiconductor Device Process
MISC (23)：
Interaction of Hydrogen with the Vacancy-oxygen Pair in n-type Silicon by Electron Irradiation "jointly authored". Semiconductor Science and Technology. 2000. 15. 2. 126-129
Characterization of Metastable Hydrogen-related Defects in n-GaAs by Isothermal Constant-capacitance-voltage spectroscopy "jointly authored". Journal of Crystal Growth. 2000. 210. 1/3. 260-263
Annihilation and Transformation of Electron Traps in Hydrogen-implanted n-type Silicon by Light Illumination "jointly authored". Material Science and Engineering. 2000. 71. 1-3. 1
Light-illumination-induced Transformation of Electron Traps in Hydrogen-implanted n-type Silicon "jointly authored". Journal of Applied Physics. 1999. 86. 10. 5630-5635
Search for Midgap levels in 3C-SiC Grown on Si Substrates "jointly authored". Japanese Journal of Applied Physics. 1999. 38. 10A. L1094-L1095
ｍore...
Books (2)：
半導体デバイス工程評価技術
リアライズ社 1990
Characterization Technologies of Semiconductor Devices
1990
Professional career (1)：
Doctor of Engineering (Osaka University)
Awards (1)：
1985 - 日東学術振興財団助成金
Association Membership(s) (2)：
電子情報通信学会
, 応用物理学会
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