Art
J-GLOBAL ID:200902115353464144   Reference number:96A0092132

Production of RF Plasmas for H- Ion Sources by an Internal Metal Antenna.

中部金属アンテナ方式による水素負イオン源用RFプラズマの生成
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Material:
Volume: 12th  Page: 68  Publication year: Sep. 1995 
JST Material Number: Y0876A  Document type: Proceedings
Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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