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J-GLOBAL ID：200902115817355599   Reference number：01A0661932

3次元イオン注入による表面改質 PSII法による表面改質と薄膜形成

Author (2)：
BABA KOMEI

About BABA KOMEI

(長崎県工技セ)

About 長崎県工技セ

, 
HATADA RURIKO

About HATADA RURIKO

(長崎県工技セ)

About 長崎県工技セ


Material：
表面技術  (Journal of the Surface Finishing Society of Japan)

About 表面技術


Volume： 52  Issue： 6  Page： 449-452  Publication year： Jun. 01, 2001 
JST Material Number： G0441B  ISSN： 0915-1869  CODEN： HYGIEX  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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three dimension

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,...
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*plasma treatment

About plasma treatment

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Irradiational changes of metals 
(BK16122N)

About Irradiational changes of metals

,  Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Reference (14)：
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Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
3次元

About 3次元

, 
イオン注入

About イオン注入

, 
表面改質

About 表面改質

, 
PSII

About PSII

, 
薄膜形成

About 薄膜形成


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