Art
J-GLOBAL ID：200902115868776572   Reference number：97A0870837

Low-cost HARMS process.

低価格HARMSプロセス
Author (3)：
BISCHOFBERGER R

About BISCHOFBERGER R

(Neu-Technikum Buchs(NTB), Buchs, CHE)

About Neu-Technikum Buchs(NTB), Buchs, CHE

, 
ZIMMERMANN H

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(Neu-Technikum Buchs(NTB), Buchs, CHE)

About Neu-Technikum Buchs(NTB), Buchs, CHE

, 
STAUFERT G

About STAUFERT G

(Neu-Technikum Buchs(NTB), Buchs, CHE)

About Neu-Technikum Buchs(NTB), Buchs, CHE


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

About Sensors and Actuators. A. Physical


Volume： A61  Issue： 1/3  Page： 392-399  Publication year： Jun. 1997 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*micromachining

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,...
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JST classification (1)：
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Manufacturing technology of solid-state devices 
(NC03030V)

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低価格

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, 
プロセス

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