Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn<sub>2</sub>SnO<sub>4</sub>, thin films.

YOUNG D L; MOUTINHO H; YAN Y; COUTTS T J

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J-GLOBAL ID：200902116413373409 Reference number：02A0614329

Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn₂SnO₄, thin films.

高周波マグネトロンスパッタ堆積したすず酸亜鉛,Zn₂SnO₄,薄膜の成長と特性評価

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Volume： 92 Issue： 1 Page： 310-319 Publication year： Jul. 01, 2002
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films

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Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films.

Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn₂SnO₄, thin films.