Two-dimensional CT images of two-frequency capacitively coupled plasma.

KITAJIMA T; TAKEO Y; MAKABE T

Art

J-GLOBAL ID：200902119804015050 Reference number：99A0969613

Two-dimensional CT images of two-frequency capacitively coupled plasma.

二周波数容量結合プラズマの二次元CT画像

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Author (3)： , ,
Material：
Volume： 17 Issue： 5 Page： 2510-2516 Publication year： Sep. 1999
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Country of issue： United States (USA) Language： ENGLISH (EN)

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