Art
J-GLOBAL ID：200902120242138624   Reference number：96A0818998

Electron Beam Testing in the Quarter-Micron Technology Era.

クォータ・ミクロン時代のEBテスティング
Author (2)：
KUJI NORIO

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(NTT LSI研)

About NTT LSI研

, 
TAKEDA TADAO

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(NTT LSI研)

About NTT LSI研


Material：
電子情報通信学会大会講演論文集  (電子情報通信学会ソサイエティ大会講演論文集)

About 電子情報通信学会大会講演論文集


Volume： 1996  Issue： Society C2  Page： 140-141  Publication year： Sep. 1996 
JST Material Number： G0508A  ISSN： 1349-1369  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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LSI

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,...
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JST classification (1)：
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Measurement,testing and reliability of solid-state devices 
(NC03040G)

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EB

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