Art
J-GLOBAL ID:200902121018161536
Reference number:00A0086151
Mechanism of columnar microstructure growth in titanium oxide thin films deposited by ion-beam assisted deposition.
イオンビーム促進蒸着により堆積した酸化チタン薄膜中の柱状微細構造の成長機構
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Author (4):
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Material:
Volume:
17
Issue:
6
Page:
3379-3384
Publication year:
Nov. 1999
JST Material Number:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
Document type:
Article
Article type:
原著論文
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
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JST classification (2):
JST classification
Category name(code) classified by JST.
Oxide thin films
, Optical properties of condensed matter in general
Terms in the title (7):
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