Dielectric functions and optical bandgaps of high-K dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry.

LIM S-G; JACKSON T N; HAENI J H; SCHLOM D G; BALBASHOV A M; UECKER R; REICHE P; FREEOUF J L; LUCOVSKY G

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J-GLOBAL ID：200902121912728629 Reference number：02A0372552

Dielectric functions and optical bandgaps of high-K dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry.

遠紫外分光偏光解析法による金属-酸化物-半導体電界効果トランジスタ用の高K誘電体の誘電関数と光学バンドギャップ

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Material：
Volume： 91 Issue： 7 Page： 4500-4505 Publication year： Apr. 01, 2002
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Ferroelectrics,antiferroelectrics and ferroelasticity

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