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J-GLOBAL ID:200902123135734442   Reference number:95A0588110

Electron traps in β-SiC grown by chemical vapor deposition on silicon (100) substrates.

シリコン(100)基板上に化学蒸着により成長させたβ-SiC中の電子トラップ
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Volume: 66  Issue: 22  Page: 3015-3017  Publication year: May. 29, 1995 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLAB  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Electronic structure of impurites and defects 
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