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J-GLOBAL ID:200902123620237929   Reference number:02A0765154

First-principles molecular-dynamics calculations and STM observations of dissociative adsorption of Cl2 and F2 on Si(001) surface.

Si(001)表面におけるCl2とF2の解離吸着の第一原理分子動力学計算とSTM観察
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Volume: 515  Issue: 2/3  Page: 287-295  Publication year: Sep. 01, 2002 
JST Material Number: C0129B  ISSN: 0039-6028  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Study of adsorption by physical means 
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