Art
J-GLOBAL ID：200902125280261598
Reference number：96A0069008
The Latest Technique of Ultraprecision Positioning. Present Condition and Exoectation for Ultra-precise Positioning Techniaues from a Questionnaire.
超精密位置決めのための最新技術 アンケート調査に見る超精密位置決め技術に関する現状と期待
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Author (2)：
,
Material：
Volume：
61
Issue：
12
Page：
1650-1655
Publication year：
Dec. 1995
JST Material Number：
F0268A
ISSN：
0912-0289
Document type：
Article
Article type：
解説
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Electric control equipment
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