Art
J-GLOBAL ID:200902126344022718   Reference number:94A0408546

Poly(isopropyliminoalane) as an AlN Precursor.

AlN前駆体としてのポリ(イソプロピルイミノアラン)
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Material:
Volume: 42  Issue:Page: 3602-3604  Publication year: Sep. 1993 
JST Material Number: Z0703B  Document type: Proceedings
Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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