Art
J-GLOBAL ID：200902127775335175   Reference number：94A0139541

Nanofabrication of photonic lattice structures in GaAs/AlGaAs.

Author (5)：
WENDT J R

About WENDT J R

(Sandia National Lab., New Mexico)

About Sandia National Lab., New Mexico

, 
VAWTER G A

About VAWTER G A

(Sandia National Lab., New Mexico)

About Sandia National Lab., New Mexico

, 
GOURLEY P L

About GOURLEY P L

(Sandia National Lab., New Mexico)

About Sandia National Lab., New Mexico

, 
BRENNAN T M

About BRENNAN T M

(Sandia National Lab., New Mexico)

About Sandia National Lab., New Mexico

, 
HAMMONS B E

About HAMMONS B E

(Sandia National Lab., New Mexico)

About Sandia National Lab., New Mexico


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 11  Issue： 6  Page： 2637-2640  Publication year： Nov. 1993 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Country of issue： United States (USA)  Language： ENGLISH (EN)
Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
GaAs

About GaAs

, 
AlGaAs

About AlGaAs


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