Art
J-GLOBAL ID:200902129242007438   Reference number:98A0380433

Electrostatic Combdrive-Actuated Micromirrors for Laser-Beam Scanning and Positioning.

レーザ光線の走査と位置決めの為の静電櫛ドライブ動力マイクロミラー
Author (4):
Material:
Volume:Issue:Page: 27-37  Publication year: Mar. 1998 
JST Material Number: W0357A  ISSN: 1057-7157  CODEN: JMIYET  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=98A0380433&from=J-GLOBAL&jstjournalNo=W0357A") }}
JST classification (1):
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
Terms in the title (5):
Terms in the title
Keywords automatically extracted from the title.

Return to Previous Page