High-resolution depth profiling in ultrathin Al<sub>2</sub>O<sub>3</sub> films on Si.

GUSEV E P; COPEL M; CARTIER E; BAUMVOL I J R; KRUG C; GRIBELYUK M A

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J-GLOBAL ID：200902130557712812 Reference number：00A0154744

High-resolution depth profiling in ultrathin Al₂O₃ films on Si.

Si上のAl₂O₃超薄膜に対する高分解能深さ分析

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Author (6)： , , , , ,
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Volume： 76 Issue： 2 Page： 176-178 Publication year： Jan. 10, 2000
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films

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High-resolution depth profiling in ultrathin Al2O3 films on Si.

High-resolution depth profiling in ultrathin Al₂O₃ films on Si.