Art
J-GLOBAL ID：200902130558322040   Reference number：01A1072817

Materials processing by gas cluster ion beams.

気体クラスタイオンビームによる材料加工
Author (4)：
YAMADA I

About YAMADA I

(Himeji Inst. Technol., Hyogo, JPN)

About Himeji Inst. Technol., Hyogo, JPN

, 
MATSUO J

About MATSUO J

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
TOYODA N

About TOYODA N

(Himeji Inst. Technol., Hyogo, JPN)

About Himeji Inst. Technol., Hyogo, JPN

, 
KIRKPATRICK A

About KIRKPATRICK A

(Epion Corp., MA, USA)

About Epion Corp., MA, USA


Material：
Materials Science & Engineering. R. Reports  (Materials Science and Engineering. R. Reports)

About Materials Science & Engineering. R. Reports


Volume： R34  Issue： 6  Page： 231-295  Publication year： Oct. 30, 2001 
JST Material Number： T0341A  ISSN： 0927-796X  Document type： Article
Article type： 文献レビュー  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*cluster ion

About cluster ion

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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ion beam etching

About ion beam etching


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Applications of electron beams and ion beams 
(BD02070X)

About Applications of electron beams and ion beams

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
気体

About 気体

, 
クラスタイオンビーム

About クラスタイオンビーム

, 
材料加工

About 材料加工


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