Art
J-GLOBAL ID：200902131021631506   Reference number：98A0282921

Formation of Ti-N Thin Films Prepared by Dynamic Ion Mixing Technique and Their Mechanical Properties.

ダイナミックイオンミキシング法によるTi-N系薄膜の形成とその機械的性質
Author (6)：
MATSUMURO AKIHITO

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(名古屋大 工)

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, 
HAYASHI TOSHIYUKI

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(名古屋大 大学院)

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, 
IKEDA OSAMU

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(名古屋大 大学院)

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, 
TAKAHASHI MITSUO

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(名古屋大 大学院)

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, 
MATSUMURA MUTSUO

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(名古屋大 大学院)

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, 
YAMAGUCHI KATSUMI

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(名古屋大 工)

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Material：
日本機械学会論文集 A編  (Transactions of the Japan Society of Mechanical Engineers. Series A)

About 日本機械学会論文集 A編


Volume： 64  Issue： 618  Page： 402-408  Publication year： Feb. 1998 
JST Material Number： F0227B  ISSN： 0387-5008  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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surface treatment

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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硬さ

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,...
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JST classification (1)：
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Surface treatment in general 
(WC08010R)

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Terms in the title (3)：
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Ti

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, 
薄膜

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, 
機械的性質

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