Heteroepitaxial growth of A1N at the resonance point of nitrogen-ECR plasma.

INUSHIMA T; ASHINO T; MURANO K; SHIRAISHI T; DAVYDOV V YU; OHOYA S

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J-GLOBAL ID：200902133409056719 Reference number：00A0277106

Heteroepitaxial growth of A1N at the resonance point of nitrogen-ECR plasma.

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Author (6)： , , , , ,
Material：
Volume： 209 Issue： 2/3 Page： 406-409 Publication year： Feb. 2000
JST Material Number： B0942A ISSN： 0022-0248 Document type： Article
Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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