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J-GLOBAL ID:200902133928461043   Reference number:97A0318344

Micromachine Technology. Stiffness of Measurement System and Significant Figures of Displacement which are Required to Interpret Adhesional Force Curves.

粘着力曲線の解釈に必要な,測定系の剛性と意味ある変位形状
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Volume: E80-C  Issue:Page: 255-262  Publication year: Feb. 1997 
JST Material Number: L1370A  ISSN: 0916-8524  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
Reference (31):
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  • BURNHAM, N. A. J. Vac. Sci. Technol. A. 1991, 9, 2548
  • HIRANO, M. Phys. Rev. B. 1990, 41, 11837
  • TAKAHASHI, K. proc. of 11th ISAS space utilization symposium. 1994, 11, 242
  • HERTZ, H. J. reine und angewandte Mathematik. 1882, 92, 156-171
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