Art
J-GLOBAL ID：200902135338948667   Reference number：02A0794866

Three-Dimensional Microfabrication of Silicon Nitride for Power Microelectromechanical Systems.

パワーマイクロ電気機械システムのための窒化けい素の三次元微細加工
Author (5)：
SUGIMOTO S

About SUGIMOTO S

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
TANAKA S

About TANAKA S

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
LI J-F

About LI J-F

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
WATANABE R

About WATANABE R

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
ESASHI M

About ESASHI M

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN


Material：
Technical Digest of the Sensor Symposium  (Proceedings of the Sensor Symposium)

About Technical Digest of the Sensor Symposium


Volume： 18th  Page： 45-50  Publication year： May. 29, 2001 
JST Material Number： X0768A  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
micromachine

About micromachine

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=02A0794866&from=J-GLOBAL&jstjournalNo=X0768A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Powder compacting,sintering 
(WC02030X)

About Powder compacting,sintering

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
パワー

About パワー

, 
電気機械

About 電気機械

, 
窒化けい素

About 窒化けい素

, 
微細加工

About 微細加工


Return to Previous Page

TOP

BOTTOM