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J-GLOBAL ID：200902135695404373   Reference number：00A0835570

Preparation of PbTiO₃ Thin Films Using a Coating Photolysis Process with ArF Excimer Laser.

ArFエキシマレーザによる被覆光分解過程を用いるPbTiO₃薄膜の調製

Author (8)： TSUCHIYA T (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  WATANABE A (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  IMAI Y (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  NIINO H (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  YAMAGUCHI I (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  MANABE T (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  KUMAGAI T (National Inst. Materials and Chemical Res., Ibaraki, JPN) ,  MIZUTA S (National Inst. Materials and Chemical Res., Ibaraki, JPN)
Material： Japanese Journal of Applied Physics. Part 2. Letters  (Japanese Journal of Applied Physics. Part 2. Letters & Express Letters)
Volume： 39  Issue： 8B  Page： L866-L868  Publication year： Aug. 15, 2000 
JST Material Number： F0599B  ISSN： 0021-4922  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *lead titanate ,...
Semi thesaurus term： pyrochlore

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JST classification (2)： Oxide thin films  (BK14050P) ,  Laser irradiation effects and damages  (BK16040S)

Reference (15)：

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• 2) J. B. Blum and S. R. Gurkovich: J. Mater. Sci. 20 (1985) 4479.
• 3) T. Katayama, M. Fujimoto, M. Shimizu and T. Shiosaki: Jpn. J. Appl. Phys. 30 (1991) 2189.
• 4) S. Okamura, A. Kakimi and T. Tukamoto: J. Ceram. Soc. Jpn. 103 (1995) 202.
• 5) K. S. Hwang, T. Manabe, T. Nagashama, I. Yamaguchi, T. Kumagai and S. Mizuta: Jpn. J. Appl. Phys. 36 (1997) 5221.

Terms in the title (4)： ArFエキシマレーザ ,  分解過程 ,  薄膜 ,  調製