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J-GLOBAL ID:200902136514959430   Reference number:01A0209135

Estimation of Uncertainty in Feature Based Metrology. (1st Report). Uncertainty from Systematic Errors in Calibration Process.

形体計測における不確かさの見積り (第1報) 校正作業で生じる系統誤差の寄与
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Volume: 67  Issue:Page: 91-95  Publication year: Jan. 05, 2001 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Measuring methods and instruments of length,area,cross section,volume,angle 
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