Art
J-GLOBAL ID：200902138034497854
Reference number：94A0223598
Novel Deposition Technique for Functional Thin Films by Using Magnetized Plasmas.
磁化プラズマによる新しい機能性薄膜形成技術
-
Publisher site
Copy service
{{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=94A0223598©=1") }}
-
Access JDreamⅢ for advanced search and analysis.
{{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=94A0223598&from=J-GLOBAL&jstjournalNo=X0038A") }}
Author (1)：
Material：
Volume：
1993
Page：
151
Publication year：
Sep. 1993
JST Material Number：
X0038A
Document type：
Proceedings
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
,
,
Return to Previous Page
