Art
J-GLOBAL ID：200902140291155969
Reference number：96A0443695
Octahedral-Structured Gigantic Precipitates as the Origin of Gate-Oxide Defects in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits.
金属-酸化物-半導体の大規模集積回路中のゲート酸化物欠陥の起源としての八面体構造の巨大析出物
-
Publisher site
Copy service
{{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=96A0443695©=1") }}
-
Access JDreamⅢ for advanced search and analysis.
{{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=96A0443695&from=J-GLOBAL&jstjournalNo=G0520B") }}
Author (5)：
,
,
,
,
Material：
Volume：
35
Issue：
2B
Page：
812-817
Publication year：
Feb. 1996
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor integrated circuit
Reference (34)：
-
NAKAJIMA, O. Ext.Abstr.(The 26th Spring Meeting, Mar.1979). Japan Soc.of Appl.Phys. 30p-R-1, 512
-
ITSUMI, M. Ext.Abstr.(The 27th Spring Meeting, Mar.1980). Japan Soc.of Appl.Phys. 3p-E-1, 553
-
ITSUMI, M. Appl.Phys.Lett. 1982, 40, 496
-
KIYOSUMI, F. Oki Denki Kenkyu Kaihatu. 1982, 49, 25, 3, 25
-
KIYOSUMI, F. Denshi-Tsushin Gakkai, Gijutsu Kenkyu Houkoku, SSD 83-66. 1983, 1
ｍore...
Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
,
,
,
,
,
,
Return to Previous Page
