In situ measurement of mechanical stress in polycrystalline zinc-oxide thin films prepared by magnetron sputtering.

HINZE J; ELLMER K

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J-GLOBAL ID：200902140347655250 Reference number：00A0921719

In situ measurement of mechanical stress in polycrystalline zinc-oxide thin films prepared by magnetron sputtering.

マグネトロンスパッタリングで調製した多結晶酸化亜鉛薄膜における機械的応力のその場測定

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Author (2)： ,
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Volume： 88 Issue： 5 Page： 2443-2450 Publication year： Sep. 01, 2000
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films

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