Observation of the Initial Stage of Ion Assisted Deposition Films Using a Rotating-Analyzer Ellipsometer.

SHIBUYA T; KAWABATA S; YOSHIZAWA H; SUZUKI S; AMANO N; YOKOTA H

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J-GLOBAL ID：200902141064572282 Reference number：96A0864789

Observation of the Initial Stage of Ion Assisted Deposition Films Using a Rotating-Analyzer Ellipsometer.

回転する分析器エリプソメータを用いたイオン支援蒸着膜の初期段階の観察

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Material：
Volume： 35 Issue： 8 Page： 4556-4560 Publication year： Aug. 1996
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Metallic thin films , Interferometry and interferometers

Reference (20)：

AZZAM, R. M. A. Ellipsometry and polarized light. 1979
ASPNES, D. E. J.Vac.Sci.Technol. 1981, 18, 289
NEE, S. F. Appl.Opt. 1988, 27, 2819
BOOTSMA, G. A. Surf.Sci. 1969, 13, 110
SMITH, T. J.Opt.Soc.Am. 1968, 58, 1069

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